• Start simulator and pump down the reactor to vacuum conditions. Check the following:
  Valves V1 and V1 are open
  Throttle valve is fully open (100%)
  Mechanical and turbo pumps are on
  Reactor pressure is below 10-6 torr
  MFC downstream valve (MFC DSV) and bypass (VB) valves are closed

• Set a value of 10 sccm for the SiH4 MFC flow
  Open the MFC DSV to admit this flow into the reactor

Observation: Admitting 10 sccm SiH4 brings the reactor pressure up from the 10-9 torr range to about 50 mtorr (5x10-2 torr).  

• Now increase the SiH4 MFC flow to 100 sccm

Observation: Increasing SiH4 input flow by 10X increases the reactor pressure to about 500 mtorr, also an increase of 10X.

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