• Start simulator and pump down the reactor to vacuum conditions. Check the following:
  Valves V1 and V1 are open
  Throttle valve is fully open (100%)
  Mechanical and turbo pumps are on
  Reactor pressure is below 10-6 torr
  MFC downstream valve (MFC DSV) and bypass (VB) valves are closed

• Now set a value of 100 sccm for the SiH4 MFC flow, and open the MFC DSV to admit this flow into the reactor

Observation: Admitting 10 sccm SiH4 brings the reactor pressure up from the 10-9 torr range to about 50 mtorr (5x10-2 torr).  

• Now close down the throttle valve to about 50% of full open

Observation: Reducing the throttle valve to 50% of fully open increases the reactor pressure to about 80 mtorr.

• Now close down the throttle valve to about 20% of full open

Observation: Reducing the throttle valve to 20% of fully open increases the reactor pressure to about 1.5 torr.

• Now close down the throttle valve to about 10% of full open

Observation: Reducing the throttle valve to 10% of fully open increases the reactor pressure to about 2.5 torr.

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