EXERCISE (use with Heat Transfer Module) Substrate Heating of Wafer

• Start simulator and pump down the reactor to vacuum conditions.
• Be sure that the wafer heating panel is set for substrate heating; if not, left-click on "more" and use the wafer heating monitor to select substrate heating.
• On wafer heating panel, set substrate temperature setpoint to 600C and turn the power on.

Observation: the substrate temperature rises gradually to the temperature setpoint, and the wafer temperature follows the changing substrate temperature fairly closely

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