System design and analysis
Now you have the capability to carry out experiments and investigations on your own, knowing now how to adjust the reaction chamber pressure by various combinations of gas inlet flow rates (through the SiH4 mass flow controller) and throttle valve position, as well as to use the pumping and venting capabilities of the system.
The Simulation Parameters control panel allows you to change the following physical parameters of the system: reaction chamber volume, mechanical pump speed, bypass conductance, vent gas source pressure, and vent line conductance. You can now carry out experiments yourself to address such questions as:
To do such experiments, be sure to exploit the Simulation Parameters tab in the
guidance section to change these parameters and to record the MFC and throttle valve
positions you used in your experiments, together with comments you write into the
parameter log which can indicate why you did the experiment and what were the results.