EquiPSim (Equipment and Process Simulation) is an engineered learning system for education and training in the semiconductor manufacturing industry. It emphasizes the behavior and mechanisms which underlie chemical processes, the associated behavior of equipment used to carry out these processes, and the manufacturing concepts essential to success. EquiPSim consists of a number of modules as described below. For beginners to this industry, it is advisable to explore them in the order shown.
|Vacuum technology||Establishment and maintenance of low pressure and vacuum environments; components|
|Gas flow||Components and approaches to reactive gas flow and control in process environments|
|Heat transfer||Radiative, conductive, and convective heat transfer mechanisms|
|Chemical reactions||Chemical reaction kinetics and key parameters employed in semiconductor manufacturing processes|
|Cluster tool||Purpose and implementation of multichamber processing; contamination control and process integration|
|Process control||Methodologies for process and equipment control|
|Optimization and statistics||Approaches to process optimization; role of statistical variation|