Components
The focus window (upper left) is a visual representation of a physical system, whose time-dependent behavior in response to your actions is determined by a physically realistic simulator operating in the background.  The schematic figure inthe focus window consists of a collection of objects, depicting system components.  You can change many of these components during the course of an experiment (i.e., when the simulator is running), and others will change as a function of time just as a real hardware system would.

COMPONENTS OPERATION

SYMBOLS

Pressure gauges Observe dynamically changing values of total pressure (in torr) at locations of pressure gauges  
Cutoff valves Click on valve to toggle open and closed. Open:    Closed: 
Gate valves Click on green button to open and red button to close. Open:      
Closed: 
Pump switches Click on switch to toggle on and off. On:    Off: 
Throttle valve Click repeatedly on green to open, or red to close.
Double-click and hold to change continuously to new value.
% indicator tells fraction of full open.
Partially open:
Fully open:     

Fully closed:  
Mass flow controller Hold up or down arrows to change flow value (in sccm).
Or, select flow value and edit.
 
Wafer Observe location and condition of silicon wafer used to make  semiconductor chips.  
Pump internals Observe rotating blades of pumps when pump is powered and operating.  
History graph
(upper right corner of module, to right of focus window)
Observe time-dependent history of parameter changes through process experiment, including:
pressures of reaction chamber (R, C), turbo pump (T), and mechanical pump (M)
wafer temperature (to be added)
deposition thickness and rate  (to be added)