COMPONENTS | OPERATION | SYMBOLS |
Pressure gauges | Observe dynamically changing values of total pressure (in torr) at locations of pressure gauges | |
Cutoff valves | Click on valve to toggle open and closed. | Open: ![]() ![]() |
Gate valves | Click on green button to open and red button to close. | Open: ![]() Closed: ![]() |
Pump switches | Click on switch to toggle on and off. | On: ![]() ![]() |
Throttle valve | Click repeatedly on green to open, or red to
close. Double-click and hold to change continuously to new value. % indicator tells fraction of full open. |
Partially open: ![]() Fully open: ![]() Fully closed: ![]() |
Mass flow controller | Hold up or down arrows to change flow value
(in sccm). Or, select flow value and edit. |
|
Wafer | Observe location and condition of silicon wafer used to make semiconductor chips. | |
Pump internals | Observe rotating blades of pumps when pump is powered and operating. | |
History graph (upper right corner of module, to right of focus window) |
Observe time-dependent history of parameter
changes through process experiment, including: pressures of reaction chamber (R, C), turbo pump (T), and mechanical pump (M) wafer temperature (to be added) deposition thickness and rate (to be added) |