References
Vacuum technology   Semiconductor manufacturing processes   Particle generation in vacuum

Vacuum technology

John F. O'Hanlon, A User's Guide to Vacuum Technology, Second Edition (John Wiley & Sons, Inc., 1989), ISBN 0-471-81242-0.

Leybold vacuum handbook, Leybold Vacuum Products Inc., 5700 Mellon Road, Export, PA 15632 (1990).

Semiconductor manufacturing processes

ULSI Technology, C. Y. Chang and S. M. Sze, editors, McGraw-Hill, 1996, ISBN 0-07-063062-3.

Volume V. Introduction to Microelectronic Fabrication, Richard C. Jaeger, Modular Series on Solid State Devices, G. W. Neudeck and R. F. Pierret, editors, Addison-Wesley, 1993, ISBN 0-201-14695-9.

Electronic Materials Science and Technology, S. P. Murarka and M. C. Peckerar, Academic Press 1989. ISBN 0-12-511120-7.

Microelectronics Processing and Device Design, R. A. Colclaser, John Wiley & Sons 1980. ISBN 0-471-04339-7.

VLSI Fabrication Principles, S. K. Ghandi, John Wiley & Sons 1983. ISBN 0-471-86833-7.

Silicon Processing for the VLSI Era, Volume 1 -Process Technology, S. Wolf and R. N. Tauber, Lattice Press, 1986. ISBN 0-961672-4-5.

Silicon Processing for the VLSI Era, Volume 2 - Process Integration, S. Wolf, Lattice Press, 1986. ISBN 0-961672-4-5.

Semiconductor Materials and Process Handbook for Very Large Scale Integration and Ultra Large Scale Integration, G. E. McGuire, Noyes Publications, 1988. ISBN 0-8155-1150-7.

Microelectronics Processing, W. S. Ruska, McGraw Hill, 1987. ISBN 0-07-054280-5.

Polycrystalline Silicon for Integrated Circuits Applications, T. Kamins, Kluwer Academic Publishers, 1988. ISBN 0-89838-259-9.

Silicon-on-Insulator Technology; Materials to VLSI, J. P. Colinge, Kluwer Academic Publishers, 1991. ISBN 0-7923-9105-0.

Particle generation in vacuum

"The Formation of Water Aerosols During Pump-Down of Vacuum Process Tools"
J. Zhao, B. Y.H. Liu, and T. H. Kuehn, Solid State Technology, Sept. 1990, p. 85.

"Preventing Particle Generation during Pressure Reduction: A New Criterion"
J. J. Wu, D. W. Cooper, R. J. Miller, and J. E. Stern, Microcontamination, Dec. 1990, p. 27.

"Controlling Particle Contamination during Venting and Pumping of Vacuum Loadlocks"
G. Strasser and M. Bader, Microcontamination, May 1990, p. 45.

"An aerosol model of particle generation during pressure reduction"
J. J. Wu, D. W. Cooper, and R. J. Miller, J. Vac. Sci. Technol. A 8 (3), May/Jun 1990, p. 1961.