Welcome to the Vacuum Technology Module

The purpose of this module is to help the student understand how vacuum pumps and technology make it possible to achieve low pressures as needed for many semiconductor manufacturing processes. Accordingly, a reaction chamber - to be used as a process reactor - will be evacuated from atmospheric pressure (1 atm, or 760 torr) down to a tiny fraction of this pressure, typically 1 millitorr or less (10-3 torr, or often 10-6 torr or less). With this capability, reactant gases can be admitted into the chamber to a controlled pressure and used to process semiconductor wafers. The exercises provided will demonstrate: